Superior Results from Sustainable Products
Etching is the process of removing material from the top of a silicon wafer to create the pattern transferred to the wafer via photolithography.
Opteon™ hydrofluoroolefin (HFO) specialty fluids are invaluable during this step of semiconductor manufacturing both as surfactants (enhancing the performance of acid etching liquids) and as agents to remove photoresist and polymer residues from wafers.
The Right Performance Characteristics in a Low GWP Fluid
Opteon™ specialty fluids’ low viscosity, low surface tension, and high solvency recommend them for a variety of precision etching applications. Opteon™ products feature a low global warming potential (GWP) and zero ozone-depletion potential, making them a sustainable choice versus legacy fluids. Moreover, Opteon™ fluids are nonflammable and safer to use than many strong solvency fluids.
